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Sulfuric acid

Sulfuric acid
Parameter Unit High purity electronic grade Reagent grade
UP Specification EL Specification AR Specification
Assay % 95.0~98.0 95.0~98.0 95.0~98.0
Color Hazen ≤10 ≤10 ≤10
Ignition residue(sulphate) ppm ----- ≤5 ≤10
Particles(≥0.5um) piece/ml ≤25 ----- -----
Particles(≥0.3um) piece/ml ≤150 ----- -----
Particles(≥0.2um) piece/ml ≤300 ----- -----
Particles(≥1.0um) piece/ml ----- ≤25 -----
Chloride ppm ≤100 ≤100 ≤3
Phosphate ppm ≤500 ≤500 -----
Nitrate ppm ≤200 ≤200 ≤0.5
Ammonium salt ppm ≤1 ≤1 ≤2
Reduction of potassium permanganate material(SO2) ppm ≤2 ≤2 ≤5
Aluminum ppb ≤10 ≤200 -----
Stibium ppb ≤5 ---- -----
Arsenic ppb ≤10 ≤50 ≤30
Barium ppb ≤10 ---- -----
Beryllium ppb ----- ---- -----
Bisumuth ppb ---- ---- -----
Boron ppb ≤20 ≤20 -----
Cadmiuth ppb ≤10 ---- -----
Calcium ppb ≤10 ≤300 -----
Chromium ppb ≤10 ≤200 -----
Cobalt ppb ---- ---- -----
Copper ppb ≤10 ≤100 ≤100
Galium ppb ---- ---- -----
Germanium ppb ----- ---- -----
Gold ppb ----- ---- -----
Iron ppb ≤10 ≤200 ≤500
Lead ppb ≤10 ≤300 ≤100
Lithium ppb ≤10 ---- -----
Magnesium ppb ≤10 ≤300 -----
Manganese ppb ≤10 ≤200 -----
Molybdenum ppb ----- ---- -----
Nickel ppb ≤10 ≤100 -----
Niobium ppb ----- ---- -----
Potassium ppb ≤10 ≤300 -----
Silver ppb ---- ---- -----
Sodium ppb ≤10 ≤300 -----
Strontium ppb ----- ---- -----
Tantalum ppb ----- ---- -----
Thallium ppb ----- ---- -----
Titanium ppb ≤10 ≤300 -----
Tin ppb ≤10 ≤200 -----
Vanadium ppb ≤10 ---- -----
Zinc ppb ≤10 ≤200 -----
Zirconium ppb ≤10 ----- -----

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