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Phosphoric acid

Phosphoric acid
Parameter Unit High purity electronic grade Reagent grade
UP Specification EL Specification AR Specification
Assay % ≥85.0 ≥85.0 ≥85.0
Particles Black once ≤10 ≤10 -----
Residue on ignition ppm ----- ≤100 ≤200
Particles(≥0.5um) piece/ml ≤25 ----- -----
Particles(≥0.3um) piece/ml ≤150 ----- -----
Particles(≥0.2um) piece/ml ≤300 ----- -----
Chloride ppm ≤2 ≤2 ≤3
Nitrate ppm ≤3 ≤3 ≤5
Sulfate ppm ≤10 ≤10 ≤30
Volatile acids mmol/100g ≤0.02 ≤0.02 ≤0.02
To restore the material ppm ≤50 ≤50 ≤100
Aluminum ppb ≤10 ≤20 -----
Antimony ppb ≤20 ----- -----
Arsenic ppb ≤50 ≤500 ≤1000
Barium ppb ≤100 ≤200 -----
Beryllium ppb ≤20 ----- -----
Bisumuth ppb ≤20 ----- -----
Boron ppb ≤20 ----- -----
Cadmiuth ppb ≤50 ≤500 -----
Calcium ppb ≤50 ≤500 -----
Chromium ppb ≤20 ≤100 -----
Cobalt ppb ≤20 ----- -----
Copper ppb ≤20 ≤500 -----
Galium ppb ≤50 ----- -----
Germanium ppb ≤10 ----- -----
Gold ppb ≤20 ----- -----
Iron ppb ≤50 ≤100 ≤20000
Lead ppb ≤10 ≤5000 ≤10000
Lithium ppb ≤10 ----- -----
Magnesium ppb ≤10 ----- -----
Manganese ppb ≤50 ≤500 ≤2000
Molybdenum ppb ≤10 ----- -----
Nickel ppb ≤10 ≤5000 -----
Niobium ppb ≤10 ----- -----
Potassium ppb ≤50 ≤5000 -----
Silver ppb ≤10 ----- -----
Sodium ppb ≤50 ≤5000 -----
Strontium ppb ≤10 ----- -----
Tantalum ppb ≤10 ----- -----
Thallium ppb ≤10 ----- -----
Titanium ppb ≤10 ----- -----
Tin ppb ≤10 ----- -----
Vanadium ppb ≤10 ----- -----
Zinc ppb ≤50 ≤1000 -----
Zirconium ppb ≤10 ----- -----

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